A Flexible Fabrication Process for RF MEMS Devices

RF MEMS are assuming a great importance in the fast evolving telecommunication market and space applications. In the last years a flexible technology platform has been developed and continuously optimized at FBK (Italy) for the fabrication of RF MEMS basic components as well as complex RF circuits working in the frequency range from sub-GHz up to more than 100 GHz. The paper reports about the fabrication process and its capabilities. The most important process features are described together with some modifications required for the manufacturing of specific devices, like dielectric less RF MEMS switches. Examples of produced devices and their performances are briefly presented.